Probe Station
EverBeing Probe Stations
EverBeing (EBI) are a probe station manufacturer, providing a complete and broad range of probing hardware. EBI's inventories are one of the largest for probing tips, tip holders, extension cables, triaxial / RF heads / adapters, micropositioners and microscopes.
The EBI markets are diverse as they are specialised, and include universities, R&D laboratories, microelectronics, nanoelectronics, microsystems, nanotechnology, micromachining, mems, material science, photonics, physics, chemistry, mechanical engineering and biotechnology.
The EBI markets are diverse as they are specialised, and include universities, R&D laboratories, microelectronics, nanoelectronics, microsystems, nanotechnology, micromachining, mems, material science, photonics, physics, chemistry, mechanical engineering and biotechnology.
Everbeing Product Overview
Products
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C-2 Mini StationListenelement 1
- 2″ Chuck
- Coaxial Stage X-Y Travel 2″x2″
- Vacuum Chuck
- Chuck Theta 15 Degrees
- 320 mm x 320 mm Base
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C-2-RF Mini
- 4-port measurement up to 70 GHz and 2 DC bias
- Special U-chuck allows DUT and calibration substrate placed simultaneously with individual vacuum switches
- Quick chuck Y-axis allows quick wafer loading
- Quick chuck Z-axis allows tip contact and release
- Use stable 1 µm resolution X-Y-Z positioners
- At 26 kg, portable and can be moved between laboratories
- Share instruments if they’re not accessible in your lab!
- At 360 mm x 330 mm footprint, can be placed inside a glovebox:
- Dry environment
- Oxygen free environment
- Hot and Cold chuck preventing oxidation or condensation.
- Small test station
- For chips or dies
- One-off testing away from production testing
- Classroom use for teaching and tutorial
- Most affordable RF station
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C-2 Probe StationListenelement 2
- Coaxial Stage X-Y Travel
- Vacuum Chuck
- Chuck Theta 30 Degrees
- Available in 4″, 6″ Chuck Size
The C-2 probe station is the most portable, equipped with the same features as the full-size probe stations. It is ideal for DC and RF applications for samples of 2 inches or less. Components such as the raised platen, coaxial X-Y stage and digital microscope mount are included with the station, making it a fully featured probing set-up, yet with a small footprint and an affordable price.
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BD SeriesListenelement 3
- Coaxial Stage X-Y Travel
- Vacuum Chuck
- Chuck Theta 30 Degrees
- Microscope Mount X-Y Travel
- Platen Up/Down (Coarse and Fine Adjust)
- Available in 6″, 8″, 12″ Chuck Size
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EB SeriesListenelement 4
- Coaxial Stage X-Y Travel
- Coaxial Up/Down
- Vacuum Chuck
- Chuck Theta 30 Degrees
- Microscope Mount X-Y Travel
- Available in 4″, 6″, 8″, 12″ Chuck Size
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CG Series
- Temperature 80K – 400K
- Vacuum chamber with NW25 ports
- 10 µm resolution micropositioners
- LD 50 L Dewar Liquid Nitrogen Tank
- Vacuum pump for environment of 10^-3 torr (pump can be upgraded for 10^-6)
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EB-050 Micropositioner
- 1 μm resolution
- 52 mm W x 96 mm D x 76 mm H
- 550 g
- RF Capable with 2″,4″ stations
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EB-700
- 1,7 μm resolution
- 38 mm W x 62 mm D x 45 mm H
- 200 g
-
EB-005
- 0.3 μm resolution
- 90 mm W x 130 mm D x 90 mm H
- 1000 g
- RF Capable with 2″,4″,6″,8″,12″ station
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Four Point Probe
- Sheet Resistivity
- Slice Resistivity
- Doping Quality
- Metalization Thickness
- P/N Typing
- V/I Measurement
- Chuck: 8″
- Lever Driven Up/Down
- Head Up/Down: 16mm
- Probing Z Resolution: 10um
- Probe Pin Material: Tungsten Carbide
- Probe Pin Spacing: 40mil, 50mil, 62.5mil
- Probe Pin Spring: 45grams, 85grams, 180grams
- Probe Pin Diameter: 40.6um
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Tip Holders
- Screw-locked
A screw at the shank end will secure the tip in place
- Spring-loaded
A spring loaded mechanism will allow user to place and secure tip
- Tubular
A clamp within the tube will securely hold the needle
Includes soft-landing inclination, optimal for thin-coat sensitive devices
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Probe Tips
- Tungsten and BeCu tips are 20 mil shank at 1.26″ length.
- Cat-whiskers are 20 mil Nickel shank at 2.2″ length.
- Gold Plated On Request for 10 µm or larger
- Bended Tips On Request
© Puchheim 2018
